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戴忠玲老师介绍
姓名:戴忠玲
办公室电话:0411-84708378
电子邮箱地址:daizhl@dlut.edu.cn
主要学历及工作经历:
1982-1986：大连理工大学物理系 本科
1986-1989：吉林大学物理系 硕士
2000-2004：大连理工大学物理系 博士
2002-至今：大连理工大学物理系 副教授
研究领域（研究课题）:
低温等离子体物理，包括低气压放电等离子体物理、等离子体输运特性、脉冲及射频等离子体鞘层特性以及等离子体刻蚀机理等方面的理论研究和计算机模拟。
承担课题：国家自然科学基金面上项目
指导硕、博士生研究方向:
1. 低气压放电等离子体特性
2. 等离子体鞘层特性
3. 等离子体刻蚀机理
出版著作和论文:
1.Jiang Wei, Xu Xiang, Dai Zhong-Ling, Wang You-Nian
Heating mechanisms and particle flow balancing of capacitively coupled plasmas driven by combined dc/rf sources.
Phys. Plasmas 15, 033502 (2008).
2.LIU Yu, DAI Zhong-Ling, WANG You-Nian
Dust Particle Properties in a Dual-Frequency Driven Sheath
CHIN.PHYS.LETT. 25, 1372(2008).
3.Z. L. Dai, C. S. Liu and Y. N. Wang,
Comparison between Dual Radio Frequency- and Pulse-Driven Sheath near Insulating Substrates,
CHIN.PHYS.LETT. 25, 632 (2008) .
4.Zhong-Ling Dai, Xiang Xu, and You-Nian Wang, “A self-consistent hybrid model of dual frequency sheath: ion energy and angular distributions”, Phys. Plasma, 14, 013547 (2007).
5.Ming-Mao, Zhong-Ling Dai, and You-Nian Wang,“RF electric field penetration and power deposition into nonequilibrium planar-type inductively coupled plaasmas”, Chin. Phys.16, 2044(2007).
6.Mao M, Dai Z L and Wang Y N,
Two-dimensional self-consistent kinetic model for solenoidal inductively coupled plasma ,
PLASMA SCIENCE & TECHNOLOGY 9 ，30(2007).
7.戴忠玲, 毛明，王友年，
等离子体刻蚀工艺的物理基础，
《物理》，35，693（2006）.
8.Li-Hong Wang, Zhong-Ling Dai, and You-Nian Wang,
Investigation of dual radio-frequency driven sheaths and ion distribution bombarding an insulator substrate,
Chin. Phys. Lett. 23, 688(2006).
9.Zhong-Ling Dai, and You-Nian Wang，
Characteristics of single and dual radio-frequency (RF) plasma sheaths,
Front. Phys. China 2,178(2006).
10.Zhen-Qun Guan, Zhong-Ling Dai, and You-Nian Wang,
Simulations of dual rf-biased sheaths and ion energy distributions arriving at a dual rf-biased electrode,
Phys. Plasma, 12, 123502 (2005).
11. Zhong-Ling Dai and You-Nian Wang,
Simulations of ion transport in a collisional radio-frequency plasma sheath,
Phys. Rev. E 69, 036403 (2004) .
12.Zhong-Ling Dai and You-Nian Wang,
Comparison between characteristics of radio-frequency sheaths and pulse sheaths with insulating substrates
Surf. Coat. Technol. 165, 224 (2003).
13.Zhong-Ling Dai, You-Nian Wang, and Teng-Cai Ma,
Spatiotemporal characteristics of the collisionless rf sheath and the ion energy distributions arriving at rf-biased electrondes,
Phys. Rev. E 65, 036403 (2002).
14.Zhong-Ling Dai and You-Nian Wang,
Multiple ion dynamics model for the collisionless rf sheaths and the ion energy distributions at rf-biased electrodes in fluorocarbon plasmas,
Phys. Rev. E 66, 026413 (2002).
15.Zhong-Ling Dai and You-Nian Wang,
Dynamic sheath model at pulsed-biased insulating substrates,
J. Appl. Phys. 92, 6428 (2002).
16.戴忠玲，王友年，马腾才，射频等离子体鞘层动力学模型,
《物理学报》Vol.50，No.12 (2001).
在读硕士、博士人数:
3人
已毕业硕士博士人数:
1人
以上资料最后修改时间:
2008-6-25
办公室电话:0411-84708378
电子邮箱地址:daizhl@dlut.edu.cn
主要学历及工作经历:
1982-1986：大连理工大学物理系 本科
1986-1989：吉林大学物理系 硕士
2000-2004：大连理工大学物理系 博士
2002-至今：大连理工大学物理系 副教授
研究领域（研究课题）:
低温等离子体物理，包括低气压放电等离子体物理、等离子体输运特性、脉冲及射频等离子体鞘层特性以及等离子体刻蚀机理等方面的理论研究和计算机模拟。
承担课题：国家自然科学基金面上项目
指导硕、博士生研究方向:
1. 低气压放电等离子体特性
2. 等离子体鞘层特性
3. 等离子体刻蚀机理
出版著作和论文:
1.Jiang Wei, Xu Xiang, Dai Zhong-Ling, Wang You-Nian
Heating mechanisms and particle flow balancing of capacitively coupled plasmas driven by combined dc/rf sources.
Phys. Plasmas 15, 033502 (2008).
2.LIU Yu, DAI Zhong-Ling, WANG You-Nian
Dust Particle Properties in a Dual-Frequency Driven Sheath
CHIN.PHYS.LETT. 25, 1372(2008).
3.Z. L. Dai, C. S. Liu and Y. N. Wang,
Comparison between Dual Radio Frequency- and Pulse-Driven Sheath near Insulating Substrates,
CHIN.PHYS.LETT. 25, 632 (2008) .
4.Zhong-Ling Dai, Xiang Xu, and You-Nian Wang, “A self-consistent hybrid model of dual frequency sheath: ion energy and angular distributions”, Phys. Plasma, 14, 013547 (2007).
5.Ming-Mao, Zhong-Ling Dai, and You-Nian Wang,“RF electric field penetration and power deposition into nonequilibrium planar-type inductively coupled plaasmas”, Chin. Phys.16, 2044(2007).
6.Mao M, Dai Z L and Wang Y N,
Two-dimensional self-consistent kinetic model for solenoidal inductively coupled plasma ,
PLASMA SCIENCE & TECHNOLOGY 9 ，30(2007).
7.戴忠玲, 毛明，王友年，
等离子体刻蚀工艺的物理基础，
《物理》，35，693（2006）.
8.Li-Hong Wang, Zhong-Ling Dai, and You-Nian Wang,
Investigation of dual radio-frequency driven sheaths and ion distribution bombarding an insulator substrate,
Chin. Phys. Lett. 23, 688(2006).
9.Zhong-Ling Dai, and You-Nian Wang，
Characteristics of single and dual radio-frequency (RF) plasma sheaths,
Front. Phys. China 2,178(2006).
10.Zhen-Qun Guan, Zhong-Ling Dai, and You-Nian Wang,
Simulations of dual rf-biased sheaths and ion energy distributions arriving at a dual rf-biased electrode,
Phys. Plasma, 12, 123502 (2005).
11. Zhong-Ling Dai and You-Nian Wang,
Simulations of ion transport in a collisional radio-frequency plasma sheath,
Phys. Rev. E 69, 036403 (2004) .
12.Zhong-Ling Dai and You-Nian Wang,
Comparison between characteristics of radio-frequency sheaths and pulse sheaths with insulating substrates
Surf. Coat. Technol. 165, 224 (2003).
13.Zhong-Ling Dai, You-Nian Wang, and Teng-Cai Ma,
Spatiotemporal characteristics of the collisionless rf sheath and the ion energy distributions arriving at rf-biased electrondes,
Phys. Rev. E 65, 036403 (2002).
14.Zhong-Ling Dai and You-Nian Wang,
Multiple ion dynamics model for the collisionless rf sheaths and the ion energy distributions at rf-biased electrodes in fluorocarbon plasmas,
Phys. Rev. E 66, 026413 (2002).
15.Zhong-Ling Dai and You-Nian Wang,
Dynamic sheath model at pulsed-biased insulating substrates,
J. Appl. Phys. 92, 6428 (2002).
16.戴忠玲，王友年，马腾才，射频等离子体鞘层动力学模型,
《物理学报》Vol.50，No.12 (2001).
在读硕士、博士人数:
3人
已毕业硕士博士人数:
1人
以上资料最后修改时间:
2008-6-25
戴忠玲老师相关教学资源
